Mass Flow Controller- Series MFC
Low Cost, Digital Readout, Set Point Adjustment
Measure, Monitor and Control gas mass flow rates reliably with Series MFC Thermal Mass Flow Controllers. Controllers offer repeatable and accurate results when delivering critical gas flows at a desired rate. Series MFC employ an electromagnetic valve and PID electronics to maintain continuous proportional control by comparing measured sensor signal to commanded flow rate. Actual gas mass flow rate is continuously displayed on a 3 ½ digit LCD readout. An in-line filter, Model No. F221 is recommended when using gases containing particulate matter.
| Media: | Clean inert and noncorrosive gases compatible with wetted parts |
|---|---|
| Transducer Input Power: | 15 to 24 VDC; ±10% |
| Accuracy: | ±1.5% full scale including linearity |
| Repeatability: | ±0.25% full scale |
| Control Range: | 5-100% full scale |
| Temperature Coefficient: | 0.08% FS per °C, or better |
| Pressure Coefficient: | 0.02% FS per psi (0.07 kg/cm2), or better |
| Response Time: | 2 seconds within 63% Oof set point |
| Max. Gas Pressure: | 150 psig (10 kg/cm2) |
| Gas & Ambient Temperature: | 32 to 122°F (0 to 50°C) |
| Leak Integrity: | 1 x 10-4 ATM cc/sec of helium max. to outside environment |
| Output Signal: | Linear, 4-20 mA into 1000Ω max. load resistance, or 0 to 5 VDC. |
| Wetted Parts: | Glass-filled Nylon® 316 SS, nickle plating, and Viton® O-rings |
| Inlet/Outlet Connection: | ¼" NPT(F) |
| Shipping Weight: | 3.5 lbs. (1.6 kg) |
| Model Number | Flow Range* |
|---|---|
| MFC1101 MFC1102 MFC1103 MFC1104 |
0 to 10 SCCM 0 to 20 SCCM 0 to 50 SCCM 0 to 100 SCCM |
*Specified flow ranges are for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg.
SUGGESTED SPECIFICATION
Thermal mass flow controller shall have 1.5% accuracy including linearity and ±0.25% repeatability. Unit utilize an electromagnetic valve and PID control to deliver desired flow rate with a linearly proportional 4-20 mA output signal. Mass flow controller shall be Dwyer Model No. MFC____.